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Diffusion of antimony in epitaxial silicon obtained by sublimation in a vacuum

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Literature cited

  1. I. B. Sladkov, V. V. Tuchkevich, and N. M. Schmidt, FTP,4, 493 (1970).

    Google Scholar 

  2. S. V. Starodubtsev, V. V. Kharchenko, V. P. Prutkin, and A. S. Lyutovich, in: Physical Properties of Especially Pure Metals and Semiconductors [in Russian], FAN (1966), p. 78.

  3. S. V. Starodubtsev, A. S. Lyutovich, V. P. Prutkin, V. P. Pashkudenko, and K. N. Sevast'yanov, in: Growth Processes and Structure of Single Crystal Semiconductor Layers [in Russian], Part 1, Novosibirsk (1968), p. 218.

  4. Lin Sui-Lun, Ulisyuébao,20, 643 (1964).

    Google Scholar 

  5. V. A. Uskov, P. V. Pavlov, E. P. Kuril'chik, and V. I. Pashkov, Fiz. Tverd. Tela,12, 1504 (1970).

    Google Scholar 

  6. V. V. Vas'kin, V. A. Uskov, and M. Ya. Shirobokov, Fiz. Tverd. Tela,7, 3356 (1965).

    Google Scholar 

  7. Yagi Kunikhro, Megumo Nobun,and Nishizawa Yunaiebi, Jap. Appl. Phys.,9, 246 (1970).

    Google Scholar 

  8. P. V. Pavlov, V. N. Panteleev, and A. V. Maiorov, Fiz. Tverd. Tela,6, 382 (1964).

    Google Scholar 

  9. I. A. Feltyn' and U. Ya. Ertelis, in: Physics of p-n Junctions [in Russian], Zinatne, Riga (1966), p. 27.

    Google Scholar 

  10. C. S. Fuller and J. A. Ditzenberger, J. Appl. Phys.,27, 544 (1956).

    Google Scholar 

  11. I. I. Rohan, N. E. Pickering, and I. Kennedy, J. Electrochem. Soc.,106, 705 (1959).

    Google Scholar 

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Authors and Affiliations

  1. Gor'kii Physicotechnical-Research Institute, USSR

    V. A. Uskov & S. P. Svetlov

Authors
  1. V. A. Uskov
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  2. S. P. Svetlov
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Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 7, pp. 145–147, July, 1972.

The authors are grateful to R. L. Snezhnova, L. S. Eremina, and O. G. Peshkovskaya for assistance in conducting the experiment.

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Uskov, V.A., Svetlov, S.P. Diffusion of antimony in epitaxial silicon obtained by sublimation in a vacuum. Soviet Physics Journal 15, 1060–1062 (1972). https://doi.org/10.1007/BF00894706

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  • DOI: https://doi.org/10.1007/BF00894706

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