This is a preview of subscription content, log in via an institution to check access.
Literature cited
Yu. D. Pankov, V. A. Kamin, and Yu. V. Pestov, Mikroélektronika,2, No. 5, 467 (1973).
Yu. D. Pankov, V. A. Kamin, Yu. V. Pestov, and S. S. Andreev, Izv. Vyssh. Uchebn. Zaved., Fiz., No. 10, 135 (1975).
Yu. D. Pankov, V. A. Kamin, and Yu. V. Pestov, VINITI, No. 1610-74 Dep.
V. A. Mukhachev, Candidate's Dissertation, K082664, Tomsk (1971).
E. V. Ivanova, Izv. Vyssh. Uchebn. Zaved., Fiz., No. 6, 136 (1975).
F. F. Forlani and A. Minnaja, J. Vac. Sci. Technol.,6, 518 (1969).
K. Simmons, J. Appl. Phys.,35, 2472 (1964).
Author information
Authors and Affiliations
Additional information
Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 8, pp. 133–134, August, 1977.
Rights and permissions
About this article
Cite this article
Kamin, V.A., Pankov, Y.D. Electrical strength of supermultilayered dielectric films. Soviet Physics Journal 20, 1093–1094 (1977). https://doi.org/10.1007/BF00892847
Received:
Revised:
Issue Date:
DOI: https://doi.org/10.1007/BF00892847