Soviet Physics Journal

, Volume 18, Issue 9, pp 1244–1247 | Cite as

Effect of alloying conditions on the structure of ohmic contacts to gallium arsenide

  • R. I. Barabash
  • M. V. Belous
  • V. N. Ivanov
  • Yu. A. Tsvirko
  • S. P. Chenakin
Article
  • 11 Downloads

Abstract

The distribution of elements in the area of a contact to gallium arsenide has been studied for various alloying conditions by the secondary ion-ion emission method. The phase and structural state of the contact before and after alloying has been investigated by x-ray structural and electron-microscopic methods. The relation between the distribution of elements in the layer and the electrical resistance of the contact is demonstrated.

Keywords

Gallium Structural State Ohmic Contact Arsenide Gallium Arsenide 

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Literature cited

  1. 1.
    M. E. Levinshtein and M. S. Shur, Zarubezhnaya Radioélektronika, No. 11, 50 (1970).Google Scholar
  2. 2.
    T. Hasby, R. Starborn, and E. L. Jones, J. Appl. Phys.,39, 4623 (1963).Google Scholar
  3. 3.
    V. N. Ivanov, V. S. Sopur, and G. N. Kompanets, Élektronnaya Tekhnika, Mikroélectronika, Ser. VI, No. 1 (1971).Google Scholar
  4. 4.
    H. Salow and E. Grobe, Z. Angew. Phys.,25, No. 3, 137 (1968).Google Scholar
  5. 5.
    A. M. Misik, A. P. Vyatkin, and I. F. Druzhinkin, Izv. Vyssh. Uchebn. Zaved., SSSR, Fizika, No. 9, 155 (1971).Google Scholar
  6. 6.
    M. A. Vasil'ev, S. P. Chenakin, and V. T. Cherenin, in: The Preparation and Properties of Thin Films [in Russian], No. 2, ONTIIPM AN UkrSSR, Kiev (1975), p. 16.Google Scholar
  7. 7.
    R. I. Jaffee, J. Member, and B. W. Gonser, Trans. AIME,166, 436 (1946).Google Scholar

Copyright information

© Plenum Publishing Corporation 1976

Authors and Affiliations

  • R. I. Barabash
    • 1
  • M. V. Belous
    • 1
  • V. N. Ivanov
    • 1
  • Yu. A. Tsvirko
    • 1
  • S. P. Chenakin
    • 1
  1. 1.Kiev Polytechnic InstituteUSSR

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