Soviet Physics Journal

, Volume 23, Issue 9, pp 823–827 | Cite as

Calculation of the composition of the liquid and solid phases in the Ga-Al-As system cooled with evaporation of the volatile component

  • A. A. Gamazov
  • L. N. Gaidina
  • V. N. Dyatlov
  • A. I. Motsar
  • L. I. Paleshnik
  • G. I. Yurko
Article
  • 23 Downloads

Abstract

The regulation of the composition of epitaxial films of solid solutions of compounds obtained in liquid-phase epitaxy is discussed. A new method is proposed for controlling the composition of an epitaxial film based on crystallization by cooling of the molten solution on a substrate with simultaneous change in the composition of the liquid phase due to evaporation of a volatile component. A calculation has been made and the possibilities of such a process demonstrated for the example of GayAl1−yAs solid solutions.

Keywords

Crystallization Evaporation Solid Solution Liquid Phase Volatile Component 

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Literature cited

  1. 1.
    V. M. Andreev, M. M. Dolginov, and D. N. Tret'yakov, Liquid Epitaxy in the Technology of Semiconductor Devices [in Russian], Sob. Radio, Moscow (1975).Google Scholar
  2. 2.
    H. Nelson, RCA Rev.,24, 603 (1963).Google Scholar
  3. 3.
    R. H. Deitch, J. Cryst. Growth,7, 69 (1970).Google Scholar
  4. 4.
    J. M. Woodall, J. Electrochem. Soc.,118, 150 (1971).Google Scholar
  5. 5.
    W. G. Pfan, J. Met.,7 (9), 961 (1955).Google Scholar
  6. 6.
    R. C. Wagner and W. C. Ellis, J. Appl. Phys.,4, 89 (1964).Google Scholar
  7. 7.
    G. A. Antypas and L. W. James, J. Appl. Phys.,41, 2165 (1970).Google Scholar
  8. 8.
    E. A. Guggenheim, Mixtures, OUP, London (1952).Google Scholar
  9. 9.
    J. Prigogine and R. Defay, Chemical Thermodynamics, Interscience, London (1965).Google Scholar
  10. 10.
    M. Ilegems and G. L. Pearson, Proc. Second Int. Symp. on Gallium Arsenide, Dallas, 1968, Oct., London Inst. Phys. and Phys. Soc. (1969), p. 3.Google Scholar
  11. 11.
    N. S. Bakhvalov, Numerical Methods [in Russian], Nauka, Moscow (1975).Google Scholar
  12. 12.
    A. A. Gamazov, A. I. Motsar', and A. A. Sidorenko, “Investigations in the physics of dielectrics and semiconductors,” Preprint [in Russian], State University, Rostov-on-Don (1975) Paper Deposited with VINITI No. 1479-76 Dep. 67–70.Google Scholar
  13. 13.
    In: Physics of Thin Films [Russian translations], Mir (1977).Google Scholar

Copyright information

© Plenum Publishing Corporation 1981

Authors and Affiliations

  • A. A. Gamazov
    • 1
  • L. N. Gaidina
    • 1
  • V. N. Dyatlov
    • 1
  • A. I. Motsar
    • 1
  • L. I. Paleshnik
    • 1
  • G. I. Yurko
    • 1
  1. 1.Kuban State UniversityUSSR

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