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The diffusion mechanism for elements of groups III and V in silicon

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Authors
  1. V. A. Panteleev
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  2. N. E. Rudoi
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  3. V. I. Okulich
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Additional information

Translated from Izvestiya Uchebnykh Zavedenii, Fizika, No. 4, pp. 157–158, April, 1973.

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Panteleev, V.A., Rudoi, N.E. & Okulich, V.I. The diffusion mechanism for elements of groups III and V in silicon. Soviet Physics Journal 16, 594–595 (1973). https://doi.org/10.1007/BF00890867

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  • DOI: https://doi.org/10.1007/BF00890867

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