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Imaging properties and applications of scanning optical microscopes

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Abstract

This review paper is concerned with the imaging properties and major uses of scanning optical microscopes. It is shown that the confocal scanning microscope exhibits a form of super-resolution and that the instrument in general has great application in nonlinear microscopy and the inspection of electronic devices.

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Authors and Affiliations

  1. Department of Engineering Science, University of Oxford, Parks Road, Oxford, UK

    T. Wilson

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  1. T. Wilson
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Wilson, T. Imaging properties and applications of scanning optical microscopes. Appl. Phys. 22, 119–128 (1980). https://doi.org/10.1007/BF00885994

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  • DOI: https://doi.org/10.1007/BF00885994

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