Abstract
Results are presented from a numerical study of the distribution of the dimensionless rate of deposition of an epitaxial layer along a reactor made in the form of a planar vertical convergent channel which is heated symmetrically.
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Translated from Inzhenerno-Fizicheskii Zhurnal, Vol. 56, No. 6, pp. 942–948, June, 1989.
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Popov, V.P. Heat and mass transfer in an epitaxial reactor of the vertical type 1. Symmetrical heating of the reactor. Journal of Engineering Physics 56, 653–658 (1989). https://doi.org/10.1007/BF00870435
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DOI: https://doi.org/10.1007/BF00870435