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The term film thickness and its definition

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Measurement Techniques Aims and scope

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Literature cited

  1. V. P. Severdenko and É. I. Tochitskii, Structure of Thick Metallic Films [in Russian], Nauka Tekh., Minsk (1968).

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  2. S. I. Ozhegov, Russian Language Dictionary, 12th ed., Russkii Yazyk, Moscow (1978).

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  3. GOST 8.362-79. GSI. Measurements of Film Thickness. Terms and Definitions.

  4. GOST 9.008-82. ESZKS. Metallic and Nonmetallic Inorganic Films. Terms and Definitions.

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Authors
  1. M. É. Vyal'yas
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  2. R. A. Laaneots
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Additional information

Translated from Izmeritel'naya Tekhnika, No. 4, pp. 17–18, April, 1990.

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Vyal'yas, M.É., Laaneots, R.A. The term film thickness and its definition. Meas Tech 33, 313–315 (1990). https://doi.org/10.1007/BF00867814

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  • DOI: https://doi.org/10.1007/BF00867814

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