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Quantitative estimate of the resolving power of a raster electron microscope

  • Opticophysical Measurements
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Measurement Techniques Aims and scope

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Literature cited

  1. V. I. Petrov, Raster Electron Microscope and X-Ray Microanalysis [Russian translation], Mir, Moscow (1984).

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Authors
  1. R. M. Ammosov
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  2. V. V. Zheleznov
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  3. A. I. Kozlitin
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  4. A. V. Nikitin
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Additional information

Translated from Izmeritel'naya Tekhnika, No. 2, pp. 22–23, February, 1987.

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Ammosov, R.M., Zheleznov, V.V., Kozlitin, A.I. et al. Quantitative estimate of the resolving power of a raster electron microscope. Meas Tech 30, 140–142 (1987). https://doi.org/10.1007/BF00865862

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  • DOI: https://doi.org/10.1007/BF00865862

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