Literature cited
A. D. Nikiforov et al., Inventor's Certificate No. 916973, Byull. Izobret., No. 12 (1982).
Additional information
Translated from Izmeritel'naya Tekhnika, No. 2, p. 19, February, 1987.
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Seinov, S.V., Kalashnikov, V.A. & Zheleznov, B.P. Capacitive profilometer. Meas Tech 30, 133–134 (1987). https://doi.org/10.1007/BF00865859
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DOI: https://doi.org/10.1007/BF00865859