Measurement Techniques

, Volume 33, Issue 5, pp 466–469 | Cite as

Method of measuring the resolution of a scanning electron microscope

  • V. G. Dyukov
  • D. S. Kibalov
Opticophysical Measurements


Electron Microscope Scanning Electron Microscope Physical Chemistry Analytical Chemistry 
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Literature cited

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Copyright information

© Plenum Publishing Corporation 1990

Authors and Affiliations

  • V. G. Dyukov
  • D. S. Kibalov

There are no affiliations available

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