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Error of the diffraction method of measuring microholes with local defects

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Measurement Techniques Aims and scope

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Literature cited

  1. V. P. Veiko and M. N. Libenson, Laser Machining [in Russian], Lenizdat, Moscow (1973).

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  2. K. I. Krylov et al., Application of Lasers in Machine-Building and Instrument-Making [in Russian], Mashinostroenie, Leningrad (1978).

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  3. V. I. Sarkin and M. G. Kruglov, Izmer., Kontrol', Avtomat., No. 5, 50 (1981).

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  4. M. Born and E. Wolf, Principles of Optics, Electromagnetic Theory of Propagation, Interference and Diffraction of Light, 4th ed., Pergamon Press, Oxford (1970).

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Authors
  1. V. A. Tarlykov
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  2. V. V. Kiiko
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Additional information

Translated from Izmeritel'naya Tekhnika, No. 11, pp. 19–21, November, 1988.

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Tarlykov, V.A., Kiiko, V.V. Error of the diffraction method of measuring microholes with local defects. Meas Tech 31, 1056–1058 (1988). https://doi.org/10.1007/BF00864299

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  • DOI: https://doi.org/10.1007/BF00864299

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