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Effects of mode composition on the error in a diffraction method of measuring small linear dimensions

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Measurement Techniques Aims and scope

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Literature cited

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Authors
  1. V. A. Tarlykov
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Translated from Izmeritel'naya Tekhnika, No. 8, pp. 22–24, August, 1986.

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Tarlykov, V.A. Effects of mode composition on the error in a diffraction method of measuring small linear dimensions. Meas Tech 29, 723–726 (1986). https://doi.org/10.1007/BF00863955

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  • DOI: https://doi.org/10.1007/BF00863955

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