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Accuracy in surface profile measurement by x-ray methods

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Measurement Techniques Aims and scope

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Literature cited

  1. F. L. Gerchikov, Radiotekhnika, i Elektronika,25, No. 9, 2001 (1980).

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  2. F. L. Gerchikov and V. D. Kosarev, Pribory i Tekhnika Eksperimenta, No. 3, 219 (1980).

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  3. N. P. Valuev, Metrologiya, No. 12, 22 (1979).

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  4. S. Z. Kuz'min, Principles of the Theory of Digital Radar-Data Processing [in Russian], Sov. Radio, Moscow (1974).

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Authors
  1. N. P. Valuev
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  2. F. L. Gerchikov
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  3. V. D. Kosarev
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  4. V. K. Latyshev
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  5. Yu. V. Moish
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  6. Yu. O. Yakubovskii-Lipskii
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Additional information

Translated from Izmeritel'naya Tekhnika, No. 8, pp. 19–20, August, 1986.

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Valuev, N.P., Gerchikov, F.L., Kosarev, V.D. et al. Accuracy in surface profile measurement by x-ray methods. Meas Tech 29, 717–720 (1986). https://doi.org/10.1007/BF00863953

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  • DOI: https://doi.org/10.1007/BF00863953

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