Skip to main content
SpringerLink
Log in

Null modulation method of unbalanced ellipsometry

  • Published:
Measurement Techniques Aims and scope

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Literature cited

  1. M. M. Gorshkov, Ellipsometry [in Russian], Sovet-skoe Radio, Moscow (1974).

    Google Scholar 

  2. A. V. Rzhanov (ed.), Principles of Ellipsometry [in Russian], Nauka, Novosibirsk (1979).

    Google Scholar 

  3. R. Azzam and N. Bashara, Ellipsometry and Polarized Light [Russian translation], Mir, Moscow (1981).

    Google Scholar 

  4. R. Azzam, J. Opt. Soc. Amer.,68, No. 4, 514 (1978).

    Google Scholar 

  5. J. Monin and G.-A. Bautry, Nouv. Rev. Optique,4, 159 (1973).

    Google Scholar 

  6. F. Vergnes and N. Dupont-Pavlovsky, Opt. Commun., 32, No. 1, 5 (1980).

    Google Scholar 

  7. R. Ya. Keimakh and V. I. Kudryavtsev, Trudy VNIIÉKIpromash, No. 11, 21 (1968).

    Google Scholar 

  8. V. E. Buslaeva and L. V. Nalbandov, Trudy VNIIM, No. 114(174), 76 (1970).

    Google Scholar 

  9. S. A. Alekseev and V. T. Prokopenko, Izmer. Tekh., No. 8, 23 (1982).

    Google Scholar 

Download references

Authors
  1. S. A. Alekseev
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. V. T. Prokopenko
    View author publications

    You can also search for this author in PubMed Google Scholar

Additional information

Translated from Izmeritel'naya Tekhnika, No.9, pp. 20–21, September, 1984.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Alekseev, S.A., Prokopenko, V.T. Null modulation method of unbalanced ellipsometry. Meas Tech 27, 777–780 (1984). https://doi.org/10.1007/BF00863738

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00863738

Keywords

Search

Navigation