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Investigation of the three-dimensional structure of a RF capacitance discharge

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Abstract

The author analyzes experimental methods of investigating the three-dimensional structure of an RF capacitance discharge (RFCD), methods which would simply and reliably determine specific features, in particular: 1) the fact that near-electrode layers xists, and the degree to which processes occurring there affect the plasma discharge parameters; 2) the singularity of each RF discharge shape, weak and concentrated, and the causes and conditions for transitions between them: and 3) the mechanism for forming a discharge structure normal to the current direction, and the possibility of simultaneous ignition of both types of RF discharge in one interelectrode gap.

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Literature Cited

  1. V. D. Rusanov and A. A. Fridman, Physics of the Chemically Active Plasma [in Russian], Moscow (1984).

  2. IEEE Trans. Plasma Sci.(Special Issue on Physics of RF Discharges for Plasma Processing),PS-14, No. 2, 7–197 (1986).

  3. B. S. Danilin and V. Yu. Kireev, Use of Low-Temperature Plasma for Etching and Cleaning Materials [in Russian], Moscow (1987).

  4. B. S. Danilin, Use of Low-Temperature Plasma for Depositing Thin Films [in Russian], Moscow (1989).

  5. V. I. Myshenkov and N. A. Yatsenko, Kvantovaya Élektron.,8, No. 10, 2121–2129 (1981).

    Google Scholar 

  6. N. A. Yatsenko, Gas Lasers with High-Frequency Excitation [in Russian], Moscow (1989) (Preprint/IPM Akad. Nauk SSSR, No. 381).

  7. N. A. Yatsenko, Spatial Structure of the High-Frequency Capacitative Discharge and Prospects of Its Use in Laser Technology [in Russian], Moscow (1988) (Preprint/IPM Akad. Nauk SSSR, No. 338).

  8. N. A. Yatsenko, Zh. Teor. Fiz.,51, No. 6, 1195–1204 (1981).

    Google Scholar 

  9. N. A. Yatsenko, Zh. Teor. Fiz.,58, No. 2, 294–301 (1988).

    Google Scholar 

  10. D. Banerji and R. Ganguli, Philos. Mag.,13, No. 6, 494–498 (1932).

    Google Scholar 

  11. J. Hay, Can. J. Res.,A16, No. 1, 191–193 (1938).

    Google Scholar 

  12. Kh. A. Dzherpetov and G. M. Patsyuk, Zh. Éksp. Teor. Fiz.,28, No. 3, 343–351 (1955).

    Google Scholar 

  13. S. M. Levitskii, Zh. Teor. Fiz.,27, No. 5, 1001–1009 (1957).

    Google Scholar 

  14. A. A. Kuzovnikov, V. L. Kovalevski, V. P. Savinov, et al., Proc. 13th Conf. Phenom. lonized Gases, Berlin (1977).

  15. A. D. Andreev, Zh. Prikl. Spektrosk.,5, No. 2, 145–147 (1966).

    Google Scholar 

  16. V. A. Golyak, A. A. Kuzovnikov, V. P. Savinov, et al., Vestn. Mosk. Gos. Univ., Ser. Fiz., No. 2, 126–127 (1968).

    Google Scholar 

  17. V. A. Godyak and A. A. Kuzovnikov, Fiz. Plasmy,1, No. 3, 496–503 (1975).

    Google Scholar 

  18. H. Beck, Zs. Physik,97, No. 2, 355–360 (1935).

    Google Scholar 

  19. Yu. P. Raizer, Physics of the Gas Discharge [in Russian], Moscow (1987).

  20. N. A. Yatsenko, Zh. Teor. Fiz.,52, No. 6, 1220–1222 (1982).

    Google Scholar 

  21. N. A. Yatsenko, Teplofiz. Vys. Temp.,20, No. 6, 1044–1051 (1982).

    Google Scholar 

  22. V. A. Godyak and O. N. Popov, Zh. Teor. Fiz.,47, No. 4, 766–771 (1977).

    Google Scholar 

  23. A. A. Kuzovnikov and V. P. Savinov, Vestn. Mosk. Gos. Univ., Ser. Fiz., No. 2, 215–223 (1973).

    Google Scholar 

  24. N. A. Yatsenko, Rep. All-Union Seminar HF Breakdown of Gases, Tarty (1989), p. 208–209.

  25. A. V. Aleksandrov, V. A. Godyak, A. A. Kozovnikov, et al., Proc. 8th Intern. Conf. Phenom. Ionized Gases, Vienna (1967), p. 165.

  26. N. A. Yatsenko, 20th Intern. Conf. Phenom. Ionized Gases, Contr. Papers, Vol. 5, Pisa (1991), pp. 1159–1160.

    Google Scholar 

  27. J. Townsend and E. Gill, Philos. Mag.,26, No. 3, 290–308 (1938).

    Google Scholar 

  28. D. He, C. J. Baker, and D. R. Hall, J. Appl. Phys.,55, No. 11, 4120–4122 (1984).

    Google Scholar 

  29. N. I. Lipatov, P. P. Pashinin, A. M. Prokhorov, et al., Tr. IOFAN, Vol. 17 [in Russian], Moscow (1989), pp. 53–116.

    Google Scholar 

  30. A. V. Kalmykov, Yu. Yu. Nezhentsev, A. S. Smirnov, et al., Zh. Teor. Fiz.,59, No. 9, 93–97 (1989).

    Google Scholar 

  31. P. P. Vitruk and N. A. Yatsenko, Pis'ma Zh. Teor. Fiz.,15, No. 5, 1–5 (1989).

    Google Scholar 

  32. N. A. Yatsenko, 14th Intern. Conf. Coherent and Nonlinear Optics, Tez. Dokl. Vol. 2 [in Russian], Leningrad (1991), pp. 52–53.

    Google Scholar 

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Authors
  1. N. A. Yatsenko
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Additional information

Institute of Mechanics, Russian Academy of Sciences, Moscow. Translated from Inzhenerno-Fizicheskii Zhurnal, Vol. 62, No. 5, pp. 739–752, May 1992.

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Yatsenko, N.A. Investigation of the three-dimensional structure of a RF capacitance discharge. J Eng Phys Thermophys 62, 530–541 (1992). https://doi.org/10.1007/BF00862340

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  • DOI: https://doi.org/10.1007/BF00862340

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