Abstract
The effect of thermal conductivity of the film-substrate contact boundary on the establishment of the quasi-stationary thermal regime during periodic-pulsed heating is studied.
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References
P. Veyko, Laser Processing of Film Elements [in Russian], Leningrad (1986).
N. N. Rykalin, A. A. Uglov, and A. N. Kokora, Laser Processing of Materials [in Russian], Moscow (1975).
M. L. Korolev, S. P. Todosevich, and V. A. Khaustov, Elektron. Tekh., Ser. 3. Mikroelektron., Vyp. 2/122, 58–60 (1987).
Yu. L. Stepanov, Defektoskopiya., No. 3, 81–85 (1976).
V. E. Gusev and A. A. Karabutov, Laser Optoacoustics [in Russian], Moscow (1991).
A. L. Zakharov and E. I. Asvadurova, Calculation of Thermal Parameters of Semiconductor Devices [in Russian], Moscow (1983).
Yu. P. Shlykov and E. A. Ganin, Contact Heat Transfer [in Russian], Moscow (1963).
M. M. Yakunkin, Teplofiz. Vys. Temp.,29, No. 4, 702–709 (1991).
K. Suguro, K. Jnoue, et al., J. Appl. Phys. Lett.,47, No. 7, 696–699 (1985).
I. S. Arshon and M. M. Yakunkin, Inzh.-fiz. Zh.,61, No. 6, 1007–1013 (1991).
G. M. Kondrat'yev, Thermal Measurements [in Russian], Moscow-Leningrad (1957).
L. P. Filippov, Measurement of Thermophysical Properties of Substances by the Periodic-Heating Method [in Russian], Moscow (1984).
E. M. Voronkova et al., Optic Materials for Infrared Technique [in Russian], Moscow (1965).
N. N. Stolovich and N. S. Minitskaya, Temperature Dependences of Thermophysical Properties of Some Metals [in Russian], Minsk (1975).
Additional information
Moscow Institute of Electronics and Mathematics. Translated from Inzhenerno-Fizicheskii Zhurnal, Vol. 64, No. 4, pp. 401–407, April, 1993.
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Yakunkin, M.M. Quasi-stationary thermal regime in a film-substrate system during periodic-pulsed heating by laser radiation. J Eng Phys Thermophys 64, 315–321 (1993). https://doi.org/10.1007/BF00859213
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DOI: https://doi.org/10.1007/BF00859213