Journal of Engineering Physics and Thermophysics

, Volume 67, Issue 5–6, pp 1067–1070 | Cite as

Modeling of diffusion of magnesium in gallium arsenide. 1. Thermal diffusion of Mg in AlxGa1−xAs

  • V. A. Labunov
  • O. I. Velichko
  • S. K. Fedoruk
Article

Abstract

A model is developed and an equation is derived for magnesium diffusion in gallium arsenide. Numerical modeling of AlxGa1−xAs doping has shown that the suggested model makes it possible to adequately describe all distinctive features of the profile of magnesium atom distribution in thermal diffusion.

Keywords

Magnesium Statistical Physic Numerical Modeling Gallium Thermal Diffusion 

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Copyright information

© Plenum Publishing Corporation 1995

Authors and Affiliations

  • V. A. Labunov
  • O. I. Velichko
  • S. K. Fedoruk

There are no affiliations available

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