Journal of Engineering Physics and Thermophysics

, Volume 67, Issue 5–6, pp 1067–1070 | Cite as

Modeling of diffusion of magnesium in gallium arsenide. 1. Thermal diffusion of Mg in AlxGa1−xAs

  • V. A. Labunov
  • O. I. Velichko
  • S. K. Fedoruk


A model is developed and an equation is derived for magnesium diffusion in gallium arsenide. Numerical modeling of AlxGa1−xAs doping has shown that the suggested model makes it possible to adequately describe all distinctive features of the profile of magnesium atom distribution in thermal diffusion.


Magnesium Statistical Physic Numerical Modeling Gallium Thermal Diffusion 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Plenum Publishing Corporation 1995

Authors and Affiliations

  • V. A. Labunov
  • O. I. Velichko
  • S. K. Fedoruk

There are no affiliations available

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