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Products of thermal desorption from silicon after its prior reaction with hydrogen chloride

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Bulletin of the Academy of Sciences of the USSR, Division of chemical science Aims and scope

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After the prior reaction of silicon with hydrogen chloride the intermediate products that are formed on the silicon surface react among themselves, with the formation of SiCl4, when the silicon is heated in the absence of HCl.

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Literature cited

  1. V. I. Zubkov, M. V. Tikhomirov, K. A. Andrianov, and S. A. Golubtsov, Dokl. Akad. Nauk SSSR,188, 594 (1969).

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Deceased.

Translated from Izvestiya Akademii Nauk SSSR, Seriya Khimicheskaya, No.2, pp.444–445, February, 1973.

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Andrianov, K.A., Golubtsov, S.A., Tikhomirov, M.V. et al. Products of thermal desorption from silicon after its prior reaction with hydrogen chloride. Russ Chem Bull 22, 423–424 (1973). https://doi.org/10.1007/BF00851006

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  • DOI: https://doi.org/10.1007/BF00851006

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