Measurement Techniques

, Volume 27, Issue 6, pp 565–567 | Cite as

An ionization method of monitoring the relative thickness of the collector of planar transistor structures

  • E. R. Astvatsatur'yan
  • P. K. Skorobogatov
  • A. A. Tomchuk
Measurement of Ionizing Radiation


Physical Chemistry Analytical Chemistry Relative Thickness Ionization Method Transistor Structure 


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Literature cited

  1. 1.
    P. K. Skorobogatov and S. A. Sobolev, in: Nuclear Electronics [in Russian], No. 11, T. M. Agakhanyan (ed.), Atomizdat, Moscow (1980), p. 80.Google Scholar
  2. 2.
    F. Larin, Radiator Effects in Semiconductor Devices, Wiley, New York (1968).Google Scholar
  3. 3.
    P. K. Skorobogatov, in: Nuclear Electronics [in Russian], T. M. Agakhanyan (ed.), Atomizdat, Moscow (1979), No. 10, p. 80.Google Scholar
  4. 4.
    A. Ya. Fedotov (ed.), Silicon Planar Transistors [in Russian], Sovet-skoe Radio, Moscow (1973).Google Scholar
  5. 5.
    R. F. Richards and P. W. Willauson, IEEE Trans.,NS-24, No. 3, 1090 (1977).Google Scholar

Copyright information

© Plenum Publishing Corporation 1984

Authors and Affiliations

  • E. R. Astvatsatur'yan
  • P. K. Skorobogatov
  • A. A. Tomchuk

There are no affiliations available

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