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Measurement Techniques

, Volume 27, Issue 6, pp 492–495 | Cite as

An automated method of measuring the thickness of an epitaxial layer

  • V. K. Grigor'ev
  • V. I. Petrovskii
  • T. A. Fedunina
Linear and Angular Measurements

Keywords

Physical Chemistry Analytical Chemistry Epitaxial Layer Automate Method 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Literature cited

  1. 1.
    A. A. Kokin et al., Elektron Promyshl., No. 1–2 (1979).Google Scholar
  2. 2.
    A. Van Der Ziel, Noise, Prentice-Hall (1970).Google Scholar
  3. 3.
    T. F. Moss et al., Semiconductor Optoelectronics, Halsted Press (1973).Google Scholar

Copyright information

© Plenum Publishing Corporation 1984

Authors and Affiliations

  • V. K. Grigor'ev
  • V. I. Petrovskii
  • T. A. Fedunina

There are no affiliations available

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