Measurement Techniques

, Volume 27, Issue 6, pp 492–495 | Cite as

An automated method of measuring the thickness of an epitaxial layer

  • V. K. Grigor'ev
  • V. I. Petrovskii
  • T. A. Fedunina
Linear and Angular Measurements


Physical Chemistry Analytical Chemistry Epitaxial Layer Automate Method 
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Literature cited

  1. 1.
    A. A. Kokin et al., Elektron Promyshl., No. 1–2 (1979).Google Scholar
  2. 2.
    A. Van Der Ziel, Noise, Prentice-Hall (1970).Google Scholar
  3. 3.
    T. F. Moss et al., Semiconductor Optoelectronics, Halsted Press (1973).Google Scholar

Copyright information

© Plenum Publishing Corporation 1984

Authors and Affiliations

  • V. K. Grigor'ev
  • V. I. Petrovskii
  • T. A. Fedunina

There are no affiliations available

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