Measurement Techniques

, Volume 27, Issue 6, pp 492–495 | Cite as

An automated method of measuring the thickness of an epitaxial layer

  • V. K. Grigor'ev
  • V. I. Petrovskii
  • T. A. Fedunina
Linear and Angular Measurements
  • 9 Downloads

Keywords

Physical Chemistry Analytical Chemistry Epitaxial Layer Automate Method 

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

Literature cited

  1. 1.
    A. A. Kokin et al., Elektron Promyshl., No. 1–2 (1979).Google Scholar
  2. 2.
    A. Van Der Ziel, Noise, Prentice-Hall (1970).Google Scholar
  3. 3.
    T. F. Moss et al., Semiconductor Optoelectronics, Halsted Press (1973).Google Scholar

Copyright information

© Plenum Publishing Corporation 1984

Authors and Affiliations

  • V. K. Grigor'ev
  • V. I. Petrovskii
  • T. A. Fedunina

There are no affiliations available

Personalised recommendations