Abstract
Various conduction mechanisms in thin SiO2, Al2O3, In2O3 layers were investigated experimentally by analyzing the behavior of the current as a function of field strength and temperature. The films were obtained by pyrolytic dissociation of organic compounds in the vapor phase.
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The author is indebted to P. S. Kireev for guidance, and to M. I. Elinson and V. B. Sandomirskii for interest in the investigation.
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Korzo, V.F. Conduction mechanisms in pyrolytically grown dielectrics. Soviet Physics Journal 10, 49–52 (1967). https://doi.org/10.1007/BF00838531
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DOI: https://doi.org/10.1007/BF00838531