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Dielectric properties of silicon nitride films

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Soviet Physics Journal Aims and scope

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Literature cited

  1. S. M. Hu and L. V. Gregor, J. Electrochem. Soc.,114, 827 (1967).

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  2. R. A. Korkina, R. P. Seisyan, and F. G. Tomashpol'skii, Élektrotekhnika, Ser. Radiodetali, No. 1 (1968).

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Authors and Affiliations

  1. Tomsk Institute of Radio Electronics and Electronic Engineering, USSR

    G. A. Vorob'ev, K. I. Smirnova & Z. A. Shandra

Authors
  1. G. A. Vorob'ev
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  2. K. I. Smirnova
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  3. Z. A. Shandra
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Translated from Izvestiya Vysshikh Uchebnykh Zavedenii Fizika, No. 6, p. 160, June, 1970.

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Vorob'ev, G.A., Smirnova, K.I. & Shandra, Z.A. Dielectric properties of silicon nitride films. Soviet Physics Journal 13, 839–840 (1970). https://doi.org/10.1007/BF00836724

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  • DOI: https://doi.org/10.1007/BF00836724

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