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A regression method for determining epitaxial film thickness

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Measurement Techniques Aims and scope

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Literature cited

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Authors
  1. V. K. Grigor'ev
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  2. V. I. Petrovskii
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  3. T. A. Fedunina
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Additional information

Translated from Izmeritel'naya Tekhnika, No. 12, pp. 22–24, December, 1981.

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Grigor'ev, V.K., Petrovskii, V.I. & Fedunina, T.A. A regression method for determining epitaxial film thickness. Meas Tech 24, 1042–1045 (1981). https://doi.org/10.1007/BF00828708

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  • DOI: https://doi.org/10.1007/BF00828708

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