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A machine for testing thin films with automatic recording of the tensile stress diagram

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Measurement Techniques Aims and scope

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Literature cited

  1. L. Maissel and R. Glang (editors), Handbook of Thin-Film Technology, McGraw-Hill, New York (1970).

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  2. L. S. Palatnik and A. I. Il'inskii, Usp. Fiz. Nauk,95, No. 4 (1968).

  3. R. I. Vorontsova and A. F. Sirenko, Probl. Prochn., No. 7 (1978).

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Translated from Izmeritel'naya Tekhnika, No. 12, pp. 21–22, December, 1981.

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Shcherbina, M.E., Zaruba, V.N. A machine for testing thin films with automatic recording of the tensile stress diagram. Meas Tech 24, 1041–1042 (1981). https://doi.org/10.1007/BF00828707

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  • DOI: https://doi.org/10.1007/BF00828707

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