Measurement Techniques

, Volume 22, Issue 11, pp 1316–1318 | Cite as

Criteria for evaluating the precision in measuring the thickness of films and coatings

  • A. I. Sergeeva
Linear and Angular Measurements
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Keywords

Physical Chemistry Analytical Chemistry 

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Literature cited

  1. 1.
    Ya. P. Glazkova, Defektoskopiya, No. 2 (1975).Google Scholar
  2. 2.
    M. G. Boguslavskii and Ya. M. Tseitlin, Instruments and Methods for Measuring Precisely Length and Angles [in Russian], Standartov, Moscow (1976).Google Scholar
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    G. V. Rozenberg, Optics of Thin-Layer Coatings [in Russian], Fizmatgiz, Moscow (1958).Google Scholar
  4. 4.
    L. Maxwell and R. Glenn (editors), Handbook on the Technology of Thin Films [Russian translation], Sovetskoe Radio, Moscow (1977).Google Scholar
  5. 5.
    S. G. Rabinovich, Measurement Errors [in Russian], énergiya, Leningrad (1978).Google Scholar
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    A. I. Sergeeva, Izmer. Tekh., No. 7 (1975).Google Scholar
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    N. M. Karikh, Izmer. Tekh., No. 5 (1977).Google Scholar
  8. 8.
    All-Union State Standard (GOST) 19525-74: “Fluoroplastic films for capacitors.”Google Scholar
  9. 9.
    GOST 17035-71: “Methods for determining the thickness of films and sheets.”Google Scholar

Copyright information

© Plenum Publishing Corporation 1980

Authors and Affiliations

  • A. I. Sergeeva

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