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Criteria for evaluating the precision in measuring the thickness of films and coatings

  • Linear and Angular Measurements
  • Published:
Measurement Techniques Aims and scope

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Literature cited

  1. Ya. P. Glazkova, Defektoskopiya, No. 2 (1975).

  2. M. G. Boguslavskii and Ya. M. Tseitlin, Instruments and Methods for Measuring Precisely Length and Angles [in Russian], Standartov, Moscow (1976).

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  3. G. V. Rozenberg, Optics of Thin-Layer Coatings [in Russian], Fizmatgiz, Moscow (1958).

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  4. L. Maxwell and R. Glenn (editors), Handbook on the Technology of Thin Films [Russian translation], Sovetskoe Radio, Moscow (1977).

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  5. S. G. Rabinovich, Measurement Errors [in Russian], énergiya, Leningrad (1978).

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  6. A. I. Sergeeva, Izmer. Tekh., No. 7 (1975).

  7. N. M. Karikh, Izmer. Tekh., No. 5 (1977).

  8. All-Union State Standard (GOST) 19525-74: “Fluoroplastic films for capacitors.”

  9. GOST 17035-71: “Methods for determining the thickness of films and sheets.”

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Authors
  1. A. I. Sergeeva
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Translated from Izmeritel'naya Tekhnika, No. 11, pp. 25–26, November, 1979.

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Sergeeva, A.I. Criteria for evaluating the precision in measuring the thickness of films and coatings. Meas Tech 22, 1316–1318 (1979). https://doi.org/10.1007/BF00827874

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  • DOI: https://doi.org/10.1007/BF00827874

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