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Determination of the impurity nonuniformity of semiconductor single crystals by interference microscopy

  • Opticophysical Measurements
  • Published:
Measurement Techniques Aims and scope

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Literature cited

  1. Yu. A. Kontsevvi and V. D. Kudin, Methods of Monitoring Semiconductor Device Production Technology [in Russian], énergiya, Moscow (1973).

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  5. A. V. Dudenkova et al., Fiz. Tekh. Poluprovodn.,5, No. 1 (1971).

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Authors
  1. V. S. Rondarev
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Additional information

Translated from Izmeritel'naya Tekhnika, No. 4, pp. 38–39, April, 1982.

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Rondarev, V.S. Determination of the impurity nonuniformity of semiconductor single crystals by interference microscopy. Meas Tech 25, 323 (1982). https://doi.org/10.1007/BF00827414

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  • DOI: https://doi.org/10.1007/BF00827414

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