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Simulation measures for especially thin coatings and means of checking them

  • Linear and Angular Measurements
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Measurement Techniques Aims and scope

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Literature cited

  1. Ya. M. Tseitlin, Defektoskopiya, No. 6 (1980).

  2. A. V. Rzhanov et al., Principles of Ellipsometry [in Russian], Nauka, Novosibirsk (1979).

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  3. K. Brudzewski, Thin Solid Films,61, No. 2, (1979).

  4. T. N. Krylova, Tr. GOI,45, issue 179 (1979).

  5. Ya. M. Tseitlin et al., Inventor's Certificate No. 777408, Byull. Izobret., No. 41 (1980).

  6. GOST 8.381-80: The State System of Measurements: Standards: Methods of Expressing Errors [in Russian].

  7. J. Dyson, Physica,24, (1958).

  8. Draft International Standard ISD/DIS 4518 “Metallic Coatings: Measurement of Coating Thickness: Profilometric Method.

  9. Ya. M. Tseitlin, Izmer. Tekh., No. 4 (1981).

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Authors
  1. Ya. M. Tseitlin
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  2. V. M. Brzhezinskii
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  3. G. B. Grechukhina
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  4. V. Ya. Demchenko
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Additional information

Translated from Izmeritel'naya Tekhnika, No. 7, pp. 27–29, July, 1982.

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Tseitlin, Y.M., Brzhezinskii, V.M., Grechukhina, G.B. et al. Simulation measures for especially thin coatings and means of checking them. Meas Tech 25, 570–573 (1982). https://doi.org/10.1007/BF00827162

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  • DOI: https://doi.org/10.1007/BF00827162

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