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Influence of ionized impurities from the substrate on nucleation in the autoepitaxial growth of semiconductors

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Authors and Affiliations

  1. Institute of Semiconductor Physics, Siberian Branch of the Academy of Sciences of the USSR, USSR

    L. N. Aleksandrov & I. A. Éntin

Authors
  1. L. N. Aleksandrov
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  2. I. A. Éntin
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Translated from Izvestiya Vysshikh Uchebnykh Zavedenii Fizika, No. 9, pp. 34–39, September, 1971.

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Aleksandrov, L.N., Éntin, I.A. Influence of ionized impurities from the substrate on nucleation in the autoepitaxial growth of semiconductors. Soviet Physics Journal 14, 1189–1193 (1971). https://doi.org/10.1007/BF00826864

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  • DOI: https://doi.org/10.1007/BF00826864

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