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Thickness measures of single-crystal silicon

  • Linear and Angular Measurements
  • Published:
Measurement Techniques Aims and scope

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Literature cited

  1. L. S. Babadzhanov et al., “Apparatus to certify thickness gauges for coatings,” Materials of the Third Republic Scientific and Technical Conference on Metrology [in Russian], Part II, Tbilisi Branch of the All-Union Scientific-Research Institute of Metrology (1974).

  2. L. S. Babadzhanov et al., “Profiling head for the certification of coating thickness gages,” Materials of the Third Republic Scientific and Technical Conference on Metrology [in Russian], Part II, Tbilisi Branch of the All-Union Scientific-Research Institute of Metrology (1974).

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Authors
  1. A. P. Oksanich
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  2. L. S. Babadzhanov
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Additional information

Translated from Izmeritel'naya Tekhnika, No. 8, pp. 49–50, August, 1978.

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Oksanich, A.P., Babadzhanov, L.S. Thickness measures of single-crystal silicon. Meas Tech 21, 1098–1099 (1978). https://doi.org/10.1007/BF00825130

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  • DOI: https://doi.org/10.1007/BF00825130

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