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Analyzing accuracy in the measurement of the thickness of dielectric films

  • Linear and Angular Measurements
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Measurement Techniques Aims and scope

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Literature cited

  1. All-Union State Standard (GOST) 14236-69; Polymer Films. Methods of Tensile Testing.

  2. GOST 8.207-76; State System of Measurements. Direct Measurements Involving Multiple Observations. Methods of Processing the Observations.

  3. GOST 6933-72: Spring Measuring Heads. Types. Basic Parameters. Technical Requirements.

  4. GOST 11198-75: Low-Pressure Pneumatic Length Measuring Instruments. Basic Parameters. Technical Requirements.

  5. GOST 14866-76: High-Pressure Pneumatic Length Measuring Instruments of the Rotameter Type. Basic Parameters. Technical Requirements.

  6. GOST 8.166-75: Plane-Parallel End Gauges. Methods and Instruments for Testing. Basic Statement.

  7. N. V. Smirnov and I. V. Dunin-Barkovskii, A Short Course on Statistics for Technical Measurement [in Russian], Fizmatgiz, Moscow (1959).

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  8. GOST 12998-73: Polystyrene Film.

  9. E. Pelz, Technik, No. 9 (1974).

  10. GOST 8.010-72: State System of Measurements. General Requirements for the Standardization and Certification of Methods of Measurement and Expenditure on Measurement Operations.

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Authors
  1. A. I. Sergeeva
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  2. Ya. M. Tseitlin
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Additional information

Translated from Izmeritel'naya Tekhnika, No. 7, pp. 34–35, July, 1981.

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Sergeeva, A.I., Tseitlin, Y.M. Analyzing accuracy in the measurement of the thickness of dielectric films. Meas Tech 24, 557–559 (1981). https://doi.org/10.1007/BF00824561

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  • DOI: https://doi.org/10.1007/BF00824561

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