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Translated from Izmeritel'naya Tekhnika, No. 2, pp. 25–26, February, 1977.
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Stolyarov, S.I., Efremenko, A.G., Galuzo, A.A. et al. Instrument for measuring thickness of epitaxial layers. Meas Tech 20, 193–196 (1977). https://doi.org/10.1007/BF00824480
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DOI: https://doi.org/10.1007/BF00824480