Effect of the law of distribution of image illumination on the accuracy of phase-type measuring systems

Conclusions

When determining the effect of the law governing the distribution of illumination of an image on the accuracy of phase measuring systems involving raster analyzers, it is not necessary to know the two-dimensional illuminance-distribution function, but only the one-dimensional function S₀(x) describing the light flux during detection of the image. During experimental assessments of the quality of an image, this leads to the need to scan by halfplane, but there is no need to determine the two-dimensional illuminance-distribution function, which is an extremely complicated procedure in practice.

Expression (9) enables the error in measuring the coordinates of the light image to be calculated, by introducing an asymmetrical law of illuminance distribution or an instability in this law.