Abstract
A calculation has been made for the sputtering of heavy targets by KeV light-ion bombardment. The calculation is based both on linear transport theory and on the assumption that only primary recoiling atoms are candidates for the sputtering process. The energy spectra calculation predicts the experimentally observed peak shift towards lower velocities than those obtained by standard linear cascade theory.
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Falcone, G., Oliva, A. Energy spectra of atoms sputtered by KeV light-ion bombardment. Appl. Phys. A 32, 201–203 (1983). https://doi.org/10.1007/BF00820261
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DOI: https://doi.org/10.1007/BF00820261