Skip to main content
SpringerLink
Log in

Small etching pits in epitaxial gallium arsenide

  • Brief Communications and Letters to the Editor
  • Published:
Soviet Physics Journal Aims and scope

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Literature cited

  1. R. L. Petrusevich, E. S. Sollertinskaya, and S. Sh. Shil'shtein, Physical Metallurgy and Processing of Nonferrous Metals and Alloys [in Russian], No. 22, Institut Giprotsvetmetobrabotka (1965).

  2. S. Sh. Shil'stein and I. V. Matveev, in: Gallium Arsenide [in Russian], No. 1, TGU, Tomsk (1969).

    Google Scholar 

  3. M. G. Mil'vidskii, V. B. Osvenskii, and T. G. Yugova, Fiz. Tverd. Tela,10, 2724 (1968).

    Google Scholar 

  4. É. N. Zhelikhovskaya and L. A. Borisova, Izv. Akad. Nauk SSSR, Neorgan. Mat.,5, 239 (1969).

    Google Scholar 

  5. L. G. Lavrent'eva and M. P. Yakubenya, in: Gallium Arsenide [in Russian], No. 2, TGU, Tomsk (1969), p. 40.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. V. D. Kuznetsov Siberian Physicotechnical Institute, Tomsk State University, USSR

    O. M. Ivleva & M. P. Yakubenya

Authors
  1. O. M. Ivleva
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. M. P. Yakubenya
    View author publications

    You can also search for this author in PubMed Google Scholar

Additional information

Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 1, pp. 148–149, January, 1971.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Ivleva, O.M., Yakubenya, M.P. Small etching pits in epitaxial gallium arsenide. Soviet Physics Journal 14, 125–126 (1971). https://doi.org/10.1007/BF00819880

Download citation

  • Received:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00819880

Keywords

Search

Navigation