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Certain characteristics of the etching of gallium arsenide single crystals

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Authors and Affiliations

  1. V. D. Kuznetsov Siberian Physicotechnical Institute at Tomsk State University, USSR

    I. V. Ivonin, L. M. Krasil'nikova & M. P. Yakubenya

Authors
  1. I. V. Ivonin
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  2. L. M. Krasil'nikova
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  3. M. P. Yakubenya
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Additional information

Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 4, pp. 141–142, April, 1971.

The authors are grateful to V. A. Moskovkin for annealing the test samples.

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Ivonin, I.V., Krasil'nikova, L.M. & Yakubenya, M.P. Certain characteristics of the etching of gallium arsenide single crystals. Soviet Physics Journal 14, 547–549 (1971). https://doi.org/10.1007/BF00817995

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  • DOI: https://doi.org/10.1007/BF00817995

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