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One mode of formation of pinholes in an amorphous silicon monoxide film

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Literature cited

  1. B. S. Danilin, Vacuum Deposition of Thin Films [in Russian], Izd. Énergiya, Moscow, 1967.

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  2. A. N. Rudnev and G. A. Efimenko, Izv. TPI (in press).

  3. W. C. Vergara, H. M. Greenhouse, and N. C. Nicholas, Rev. Sci. Instr.,34, 520, 1963.

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  4. A. N. Rudnev and G. A. Efimenko, Izvestiya VUZ. Fizika [Soviet Physics Journal], no. 3, 144, 1968.

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  5. G. A. St. John and S. W. Chalkin, IEEE Transactions on Parts, Materials and Pack, V. PMP-2, no. 1–2, March, 1966

  6. A. G. Belevtsev, Microminiaturization of Radioelectronic Equipment [in Russian], Izd. Energiya, Moscow, 1965.

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Authors and Affiliations

  1. Tomsk Institute of Radioelectronics and Electronic Engineering, USSR

    V. A. Mukhachev & A. N. Rudnev

Authors
  1. V. A. Mukhachev
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  2. A. N. Rudnev
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Translated from Izvestiya VUZ. Fizika, Vol. 11, No. 11, pp. 133–135, November, 1968.

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Mukhachev, V.A., Rudnev, A.N. One mode of formation of pinholes in an amorphous silicon monoxide film. Soviet Physics Journal 11, 116–117 (1968). https://doi.org/10.1007/BF00816079

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  • DOI: https://doi.org/10.1007/BF00816079

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