Errors of a three-electrode capacitance transducer for thickness measurement on planar insulations
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The results indicate that one gets high accuracy from devices using a combination of working and standard transducers.
It is possible to calculate the temperature error of the transducer and thus to select materials having optimal linear expansion coefficients.
The minimal error is provided by allowing for the filling factor of the transducer and the dielectric constant of the material.
KeywordsPhysical Chemistry Analytical Chemistry Dielectric Constant Expansion Coefficient Filling Factor
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