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Measuring the thickness and conductance of thin films in the course of their deposition

  • Linear and Angular Measurements
  • Published:
Measurement Techniques Aims and scope

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Literature cited

  1. V. A. Sterkhov, N. D. Tokarev, and A. I. Zharavin, Izmeritel'. Tekh., No. 8 (1973).

  2. V. N. Chernyaev and V. A. Tuchin, Pribory i Sistemy Upravleniya, No. 9 (1972).

  3. A. B. Davydov and Yu. G. Arapov, Pribory i Tekh. Éksperim., No. 6 (1967).

  4. A. I. Shpuntov (editor), Theory of Ultrahigh Frequency Transmission Lines [Russian translation], Sov. Radio, Moscow (1951).

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  5. W. E. Sweenly, R. E. Seebald, and L. S. Birks, J. of Appl. Phys.,31, No. 4 (1960).

  6. L. Holland, Vacuum Deposition of Thin Films, Halsted Press (1956).

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Authors
  1. V. A. Sterkhov
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  2. N. D. Tokarev
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Additional information

Translated from Izmeritel'naya Tekhnika, No. 4, pp. 45–47, April, 1974.

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Sterkhov, V.A., Tokarev, N.D. Measuring the thickness and conductance of thin films in the course of their deposition. Meas Tech 17, 552–554 (1974). https://doi.org/10.1007/BF00812653

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  • DOI: https://doi.org/10.1007/BF00812653

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