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Properties of nitrided molybdenum films at cryogenic temperatures

  • Research Methods and Powder Material Properties
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Soviet Powder Metallurgy and Metal Ceramics Aims and scope

Conclusions

The optimum temperature range for nitriding thin molybdenum films is 923 to 1023°K for a nitriding time of no more than 12 min.

The resistance temperature coefficient for nitrided molybdenum films is one to two orders of magnitude lower than for the original film values.

Nitrided molybdenum films are superconductors with a critical transition temperature Tc = 7.4°K for Mo2N and 13.8°K for MoN. These films are promising for the production of noiseless interconnections for integrated circuits.

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Literature cited

  1. Zhao You-xiang and He Shou-an, “A possible high Tc superconductor,” Solid-State Commun.,45, No. 3, 281–283 (1983).

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Authors and Affiliations

  1. Institute of Materials Science Problems, Ukrainian Academy of Sciences, Kiev

    V. A. Brazhnik, V. I. Lazorenko, G. V. Lashkarev, V. M. Pronenko, V. I. Rul'kov & D. A. Fedorchenko

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  1. V. A. Brazhnik
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  2. V. I. Lazorenko
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  3. G. V. Lashkarev
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  4. V. M. Pronenko
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  5. V. I. Rul'kov
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  6. D. A. Fedorchenko
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Additional information

Translated from Poroshkovaya Metallurgiya, No. 6(354), pp. 102–106, June, 1992.

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Brazhnik, V.A., Lazorenko, V.I., Lashkarev, G.V. et al. Properties of nitrided molybdenum films at cryogenic temperatures. Powder Metall Met Ceram 31, 547–550 (1992). https://doi.org/10.1007/BF00802459

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  • DOI: https://doi.org/10.1007/BF00802459

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