Conclusions
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1.
The sintering of thin 80% Ni-20% Cr alloy films of various thicknesses was investigated by determining the effect of different heat treatments on their electrical resistance. The hypothesis is advanced that zonal isolation processes are chiefly responsible for changes in electrical resistance during thermal stabilization.
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2.
An effective method has been proposed for the deposition and heat treatment of 80% Ni-20% Cr alloy films with a surface resistance of 300ω/cm2. The resultant films exhibit resistance variations of not more than 0.02% in high-temperature stability tests and not more than 0.1% in low-temperature and thermal shock stability tests.
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Literature cited
M. V. Belous, V. G. Permyakov, and V. I. Popov, Fiz. Metal, i Metalloved.,25, No. 4, 657 (1968).
N. Schwartz and R. U. Berry, The Physics of Thin Films [Russian translation], Vol. 2 (1967).
M. V. Belous, L. P. Grankina, et al., Fiz. Metal. i Metalloved.,16, No. 5, 669 (1963).
R. G. Raitsyn, in: Exchange of Experience in the Electronic Industry [in Russian], No. 1 (1967) p. 23.
M. V. Belous, L. P. Grankina, et al., Fiz. Metal. i Metalloved.,19, No. 6, 840 (1965).
S. V. Ostrovka, M. V. Renard, and B. M. Aksantseva, Mikroélektronika, No. 4, 221 (1969).
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Translated from Poroshkovaya Metallurgiya, No. 7 (115), pp. 22–27, July, 1972.
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Ometova, L.F., Trofimova, A.A. Sintering of thin 80% Ni-20% Cr alloy films. Powder Metall Met Ceram 11, 532–535 (1972). https://doi.org/10.1007/BF00798189
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DOI: https://doi.org/10.1007/BF00798189