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Translated from Poroshkovaya Metallurgiya, No. 4(256), pp. 47–51, April, 1984.
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Panov, V.S., Sekridova, O.B. Deposition of silicon nitride coatings. Powder Metall Met Ceram 23, 293–296 (1984). https://doi.org/10.1007/BF00796391
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DOI: https://doi.org/10.1007/BF00796391