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Deposition of silicon nitride coatings

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Soviet Powder Metallurgy and Metal Ceramics Aims and scope

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Literature cited

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Translated from Poroshkovaya Metallurgiya, No. 4(256), pp. 47–51, April, 1984.

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Panov, V.S., Sekridova, O.B. Deposition of silicon nitride coatings. Powder Metall Met Ceram 23, 293–296 (1984). https://doi.org/10.1007/BF00796391

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  • DOI: https://doi.org/10.1007/BF00796391

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