Literature cited
N. J. Archer and F. J. Wood, “PACVD of engineering coatings,” Ipat Workshop: Wear Resistant Coat. (Amsterdam, 26–27 May, 1988), Edinburgh (1988).
M. R. Hilton, M. Salmeron, and G. S. Somoryai, “The effect of argon during plasma-assisted chemical vapor deposition of TiN,” Thin Solid Films,167, L31-L34 (1988).
E. Funaki, T. Matsudzawa, and I. Huang, “Formation of titanium compound films by chemical deposition from the vapor phase reinforced by a plasma glow discharge,” Kindzoku Khemen Gidzyuku,35, No. 12, 595–599 (1984).
L. A. Ivashchenko, G. V. Rusakov, and S. S. Ponomarev, “Study of coatings based on titanium carbonitride prepared by a gas-phase method of deposition activated by a HFdischarge,” in: Protective Coatings on Metals, No. 29 [in Russian], Naukova Dumka, Kiev (1989).
V. S. Luk'yanchikov and A. V. Kolesnichenko, “Study of the process of flushing a hydrated hydrogen cell,” Khim. Tekhnol., No. 1, 49–52 (1986).
G. V. Samsonov, G. Sh. Upadkhaya, and V. S. Neshpor, Physical Metallurgy of Carbides [in Russian], Naukova Dumka, Kiev (1974).
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Translated from Poroshkovaya Metallurgiya, No. 2(350), pp. 18–23, February, 1992.
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Ivashchenko, L.A., Rusakov, G.V. Application of plasma deposition with the aim of obtaining oxycarbonitride coatings on hard alloys. Powder Metall Met Ceram 31, 112–116 (1992). https://doi.org/10.1007/BF00794043
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DOI: https://doi.org/10.1007/BF00794043