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Formation of ZnO films by CO2 laser evaporation at atmospheric pressure on glass and organic substrates

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Journal of Materials Science Letters

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References

  1. M. Ohmine,Kogyo Zairyo 35 (1987) 49.

    Google Scholar 

  2. C. M. Dai, C. S. Su andD. S. Chuu,Appl. Phys. Lett. 57 (1990) 1879.

    Google Scholar 

  3. J. T. Cheung,ibid. 43 (1983) 462.

    Google Scholar 

  4. S. Mineta, N. Yasunaga, M. Kohata andY. Kikuta,J. Jpn. Soc. Precision Engng. 56 (1990) 128.

    Google Scholar 

  5. K. Maruyama, S. Endo, G. Sasaki, K. Kamata, J. Nishino andK. Kuchitsu,J. Mater. Sci. Lett. 11 (1992) 1588.

    Google Scholar 

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Maruyama, K., Sasaki, G., Endo, S. et al. Formation of ZnO films by CO2 laser evaporation at atmospheric pressure on glass and organic substrates. J Mater Sci Lett 13, 1737–1739 (1994). https://doi.org/10.1007/BF00776341

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  • DOI: https://doi.org/10.1007/BF00776341

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