Ohmic contacts made by fusing on single crystals of silicon carbide
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The best material for ohmic contacts for n-SiC is a gold — tantalum (9∶1) alloy since the resistance of the fused contact made from this alloy in SiC has a minimum value. If it is necessary to obtain higher temperature and mechanically stronger contacts, then the best are contacts made from tungsten, despite the relatively high resistance compared with contacts made from the tantalum — gold alloy.
The best material for ohmic contacts for p-SiC is a gold — tantalum — aluminum alloy in the ratio 8.8∶1∶0.2, but in certain cases it is possible to recommend titanium contacts.
KeywordsAluminum Silicon Gold Titanium Carbide
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