Chemical etching of {1 1 1} and {1 0 0} surfaces of InP

Abstract

The effects of a number of chemical etches on the III–V semiconductor InP were studied, using {1 0 0} and {1 1 1}-type faces. The (1 1 1) and (¯1¯1¯1) faces were found to behave differently, and this was attributed to the polarity of the zinc-blende lattice. Curves showing etching rate as a function of penetration were plotted, and it is noted that they demonstrate an enhanced etching rate close to the surface. This is attributed to the damaged surface layer associated with the cutting of a crystal slice. Photographs were taken at various stages of the etching using both the optical and scanning electron microscopes. Both etch pits and etch hillocks were observed. The shapes of the pits are compared to those described in previously published work, and possible reasons for these shapes are discussed. The conditions necessary for the production of an etch hillock are described and it is shown that the measured etching rates are consistent with hillock formation in the case of the 1 HCl∶1HNO₃ etch. The mechanisms of dissolution are discussed and it is suggested that both activation control of the dissolution process and diffusion control were observed in the work.