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Anisotropic etching of silicon with ultrasonic effect

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Faculty of Electrical and Electronics Engineering, Technical University of Istanbul, 80626, Maslak, Istanbul, Turkey

    A. Kuntman

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  1. A. Kuntman
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Kuntman, A. Anisotropic etching of silicon with ultrasonic effect. J Mater Sci Lett 11, 1274–1275 (1992). https://doi.org/10.1007/BF00742176

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  • DOI: https://doi.org/10.1007/BF00742176

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