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Characterization and crystallite growth of semiconducting high-temperature-stable Ga2O3 thin films

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Siemens AG, Research Laboratories, Otto-Hahn-Ring 6, 8000, Munich 83, FRG

    M. Fleischer & H. Meixner

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  1. M. Fleischer
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  2. H. Meixner
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Fleischer, M., Meixner, H. Characterization and crystallite growth of semiconducting high-temperature-stable Ga2O3 thin films. J Mater Sci Lett 11, 1728–1731 (1992). https://doi.org/10.1007/BF00736223

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  • DOI: https://doi.org/10.1007/BF00736223

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