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Spectroscopic ellipsometric measurements of plasma-enhanced chemical vapour deposition-grown SiN x InP structure

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Optical Electronics Laboratory, Korea institute of Science and Technology, Cheongryang, PO Box 131, 130-650, Seoul, Korea

    I. K. Han, Y. J. Lee, J. I. Lee & K. N. Kang

  2. Department of Electric Engineering, Ajou University, 441-749, Soowon, Korea

    S. Y. Kim

Authors
  1. I. K. Han
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  2. Y. J. Lee
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  3. J. I. Lee
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  4. K. N. Kang
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  5. S. Y. Kim
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Han, I.K., Lee, Y.J., Lee, J.I. et al. Spectroscopic ellipsometric measurements of plasma-enhanced chemical vapour deposition-grown SiN x InP structure. J Mater Sci Lett 11, 1689–1691 (1992). https://doi.org/10.1007/BF00736210

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  • DOI: https://doi.org/10.1007/BF00736210

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