Abstract
Detailed transmission electron microscopic study has been carried out on heteroepitaxial YBa2Cu3O7/SrTiO3/YBa2Cu3O7 trilayer thin films grown on (100)SrTiO3 substrates prepared by DC and RF magnetron sputtering. The microstructural results showed the existence of somea-axis-oriented YBCO grains 20–90 nm wide in thec-axis-oriented YBCO matrix. Some of thea-axis grains in the lower YBCO thin film layer have protruded into the above SrTiO3 layer, which may cause short circuit between the two YBCO superconducting layers. This is unsuitable for the application of trilayer thin films for microelectronic devices. The defects on the surface of the substrates would also influence the growth quality of the YBCO thin films.
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Guo, L.P., Liu, G.R., Zhou, W.L. et al. Microstructural study of YBa2Cu3O7/SrTiO3/YBa2Cu3O7 heteroepitaxial trilayer films grown on (100) SrTiO3 substrates. J Supercond 8, 155–161 (1995). https://doi.org/10.1007/BF00732258
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DOI: https://doi.org/10.1007/BF00732258